KLA-Tencor 5200XP

KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:
- Model: 5200XP
- Overlay Registration(stepper alignment) and
Critical Dimension (CD) Measurement System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement for
Overlay Registration (stepper alignment).
The Overlay Registration specification is 4nm per
KLA’s published spec sheet
- Fully Automated Non-Contact CD Measurement and
we recommend it to be used for CD’s the size of 1.5um or above
- Uses Proven Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership. Includes KLASS
(KLA Stepper Set-up Software) which allows the calculation of
critical parameters for overlay control on lithography tools
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to Meet Published KLA-Tencor 5200XP Specifications
- We can include installation, training, and warranty

Condition: Refurbished