KLA P10

wafer size:150mm
– Sample size: up to 200mm
– Low force head: 0.05 – 15mg
– 0.05mg resolution
– Step heigh repeatability, 0.001µm max. in the 13µm range; 0.005µm max in the 130µm range
– Scan length: 150mm
– Scan speed: 1µm/sec to 25mm/sec
– Scan sampling rates: 50, 100, 200, 500, 1000Hz
– Vertical range:
at 0.008Å resolution: ±6.5µm
at 0.8Å resolutions: ±65µm
at 0.6Å resolutions: ±1000µm
– Horizontal resolution at 1µm/sec scan speed: 0.01µm
– Angle resolution: 0.001°