Keyence VR-3200

【specification】
・Measuring head/controller: VR-3200/VR-3000
・Observation mode: Wide field of view (12, 25, 38, 50x), high magnification (40, 80, 120, 160x) *On a 15-inch monitor
・Measurable height: Wide field of view (10mm±5mm), high magnification (1mm±0.5mm)
・Measurement accuracy: ±3μm (height), ±5μm (wide field of view, width measurement), ±2μm (high magnification, width measurement)
・Stage stroke: X184mmxY88mm (electric), Φ90mm rotary table
・Z-axis stroke: 90mm (electric)
・Working distance: 75mm
・Image sensor: 1 type 4 million pixel monochrome CMOS
・Emitting/receiving lens: Double telecentric x2/double telecentric
・Illumination: LED ring (RGB, for observation), white LED (for measurement)
・Image size: 1024x768pix, 2048x1536pix
・Power source: AC100-240V±10%, 50/60Hz, 150VA
・Quality Quantity: Approx. 28kg (head, 100mm height spacer not included), approx. 3.8kg (controller)
・Equipped with software: VR-H2V observation app,
VR-H2A analysis app
VR-H2J connection module, VR-H2P comparison measurement module
VR-H2CA3D-CAD comparison measurement module
・100mm height spacer: Installed (OP-87708)
*Maximum height of test object: 170mm (equipped with VR-S200 motorized stage)
*Maximum height of test object: 188mm (when motorized stage is removed)

[Device status]
・Instruction manual included
・VR Calibration Standard (OP-87710) included