Karl Suss MA8/BA6 Mask Aligner

Karl Suss MA8/BA6 Mask Aligner consisting of:
- Model: MA8/BA6
- Configured for Topside Alignment (TSA)
- Suss DVM8 Microscope (Dual Video Microscope)
- Objectives: 5x, 10x, 20x
- Power: 230V, 50/60 Hz
- UV400 Optics (for 365nm and 405nm exposure)
- Suss CIC 1000 Power Supply
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 1000W Lamphouse
- Anti-Vibration Table
- Vacuum chuck: 6“ wafer chuck included (other sizes available)
- Maskholder: 7” included (other sizes available)
- Vintage: 2000
- Operations Manual and Documentation

CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt

Condition: Refurbished