Karl Suss 150e

- Alignment System MA150e TSA
- PC -Aut. Adjustment ( Autoalignment System) Cognex 8100 ( Patmex ) TSA
- Lamphouse unit LH 1000 with HP and 1000W Hg-Lamp,
- Intensity >25 mW/cm², Wavelength: 365 nm (I-line filter)
Suss DVM 6 dual video Microscope (2CCD–Cameras /set of rotating Objectives L+R)
- Objective 5x
- Objective 10x
- Objective 20X
- Transport Plates Kit MA150 / W100-150/Even
- Exposure Chuck Prox/Cont W150
- Maskholder MA 150/TL/Prox/Cont/W150 (7” x 7”) Chuck 6”
- CIC1200 Lamp Power supply
- 1 Set of Exposure optics Typ A / UV400 350-450 nm ( g-, h-, i-line )
- 1 Non Contact Prealigner Station with IR – Sensor
- 1 Operators Manual MA 150e English (Digi.)