Hitachi M8000 - M8190XT

Wafer Size 300 mm
Fab Section Etch

General Product Information
Vendor Supplier HITACHI
Model M8000 - M8190XT
Vintage 2013
Asset Description Hitachi tool
Software Version 2.0405
CIM E84, SECS-GEM. GEM300, Interface A
Process ETC_SpacerEtch

Hardware Confguration (Fab)
Main System mf 1 OK
Main System Strip chamber 1 OK
Factory Interface FOUP 1 OK
Main System Process Chambers 3 OK
Handler System Transfer Chamber 1 OK

Missing/Faulty Parts / Accesorries List
Turbos from
Process
Chambers