Hitachi M-8190XT

Ref : 2608446-9-CP

Condition : Used

Manufacturer : Hitachi

Model : M-8190XT

Year(s) : 2013

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Last check : 17 Apr. 2024

3 Chambers
In Fab, Warm Idle
Software version: 2.0405
CIM: E84, SECS-GEM. GEM300, Interface A
Hardware Configuration (fab):
Main system: Hitachi HTA M-8190XT (3E) Etch System - 1
SMIF system: Load Ports - 3
Handler system: Standard Automation Equipment & Software - 1
Options: Equipment Specification based upon #KF0-6359

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