Glen R3A

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort.
Active Plasma for routine cleaning of sample surfaces
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes: ACTIVE PLASMA for routine cleaning of sample surfaces;RIE PLASMA for aggressive cleaning of non-ESD sensitive samples; DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp
RIE Plasma for aggressive cleaning of non ESD sensitive samples
Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz