EVG 620 Mask Aligner
AMERICA North (USA-Canada-Mexico)
EVG 620 MASK ALIGNER consisting of:
- Model: EVG620 (Upgraded from a 420)
- Manual Mask Aligner
- Topside Alignment (TSA)
- Backside Ailgnment (BSA)
- Automatic Alignment
- Up to 6"/150mm Wafer Capable (with proper chuck)
- Objectives (Qty 2)
- Vacuum Chuck: request at time of order
- Maskholder: request at time of order
- Mask Load Frame: request at time of order
- Can be Operated in Proximity, Soft Contact,
Hard Contact or Vacuum Contact Exposure Modes
- Tooling Exchanges are Quick,
Simple and can be Performed Within Minutes
- Lamphouse: 500W Lamphouse
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620
- Sold with 6 Month Warranty!
CLASSONE'S MASK ALIGNER REFURBISHMENT PROCESS consists of:
- Ellipsoidal Mirror Replaced with New
- UV Lamp Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original
Specifications
- WEC Head Rebuilt as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed
INSTALLATION AND SUPPORT WORLDWIDE OF EVG MASK ALIGNERS:
- ClassOne Supports all its Used and
Refurbished EVG Mask Aligners with Spare Parts and
Service Worldwide
- Installation & Training Available Worldwide
CONDITION:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.