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Ebara EPO-222
Ref :
254158
Condition :
Used
Manufacturer :
Ebara
Model :
EPO-222
Year(s) :
2000
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 200 mm
Fab Section CMP
General Product Information
Vendor Supplier EBARA
Model EPO-222
Vintage 2000
Asset Description Ebara 222 Oxide CMP
Software Version VME3.13.31/TouchPanel3.5.14
CIM SECS/GEM
Process Oxide ILD/IMD CMP
Hardware Confguration (Fab)
Factory Interface SMIF 2 OK
Main System Polishing&CleanerUnit 2 OK
Handler System Robot1&2 Rorze 2 OK
Missing/Faulty Parts / Accesorries List
Indexer/ SMIFBlowerFan 1
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