Ebara EPO-222

Ref : 2697856-9-FM

Condition : Used

Manufacturer : Ebara

Model : EPO-222

Year(s) : 2000

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 200 mm
Fab Section CMP

General Product Information
Vendor Supplier EBARA
Model EPO-222
Vintage 2000
Asset Description Ebara 222 Oxide CMP
Software Version VME3.13.31/TouchPanel3.5.14
CIM SECS/GEM
Process Oxide ILD/IMD CMP

Hardware Confguration (Fab)
Factory Interface SMIF 2 OK
Main System Polishing&CleanerUnit 2 OK
Handler System Robot1&2 Rorze 2 OK

Missing/Faulty Parts / Accesorries List
Indexer/ SMIFBlowerFan 1

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