DNS WS-820L

Automated wafer cleaning system
4 robots

Condition:
Complete like new working condition,
only used during acceptance, no production.
No de-installed and in storage.

Configuration:
Automated Alpha Tool (Double Sided Porous Silicon:
25 wafer batch) based on WS-820L platform retrofittable to
50 wafer batch double sided

Wafer size 200mm
Wafer Flow Left to right
Cassette included

Components to include:
Main body – 1 unit
Loader – 1 unit
Unloader – 1 unit
Two robots for bath to bath transfer systems – one robot for
wet wafers and one for dry wafers;

Robot arms to be Teflon coated quartz - 2 units
Double Sided Porous Silicon bath – 1 unit
Electrical Breaker Box for U.S. safety regulation
CD ROM Manuals
Material is FM-PVC to meet FM4910 criteria

System description:
Position 1 : Loader (CTC type)
Position 2 : CHCL (Robot Chuck Clean)
Position 3 : PS (Single-Double Sided Porous Silicon bath)
Position 4 : QDR (Quick Dump Rinse)
Position 5 : SD (Spin Dryer)
Position 6 : Unloader (CTC type)

Other components:
Notch Aligner
Wafer Counter
Fire extinguisher system for PS bath
HF49% replenishment function for PS bath
IPA replenishment function for PS bath(w/ anti explosion)