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Cambridge Fiji F200
Ref :
2075837-9-GO
Condition :
Used
Manufacturer :
Cambridge
Model :
Fiji F200
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
26 Nov. 2019
Description:
Atomic layer deposition system with load lock
Any substrate up to 200 mm wafer
Plasma enhanced ALD available with O2, Ar, and N2 gases
Thermal ALD with temperatures up to 300°C
Turbo pump with APC
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