Brumley South SST-1500

Our Particle Deposition System SST-1500is the only tool in
the semiconductor industry that
produces the highest quality NIST Traceable and
Non-Traceable Latex Sphere Calibration Standards up
to 300mm at a low cost under 75K!

In the process of production, Polystyrene Latex Spheres (PSL)
are deposited on the surface of silicon wafer or
other substrates in a highly controlled environment and
the end result is the Latex Sphere Calibration Standard that
can be used to calibrate any particle counter,
including ADE, KLA Tencor Surfscan or other patterned,
or unpatterned wafer inspection equipment.

SPECIFICATIONS:
Sphere Size Range:PSL Sphere diameters of 20nm to 4.0 um
Substrate Sizes:100, 125, 150, 200 and 300mm wafers, PhotoMask, LCD panels.
Deposition Time: Variable, user selectable.
Wafer to Wafer Repeatability: < 7 % after setup.
Clean/Purge Time:Average time 30 seconds into HEPA exhaust filter.
Warranty:1 year parts and labor.