Bruker GT-X

[Specifications]
- Model year: 2012
- Measurement principle: VSI method: White light vertical scanning interference method
PSI method: Phase shift interference method
VXI method: Phase shift + vertical scanning interference method
- Vertical resolution: (PSI) 0.1nmRa, (VXI) 0.5nm, (VSI) 1nm Ra
- Maximum vertical step: (PSI) 100nm, (VXI) 150um, (VSI) 10mm
Step measurement accuracy: 0.5% or less
(when measuring step difference based on 8um/VSI)
Light intensity adjustment: Automatic adjustment function
Stage: XYZ automatic stage, 12-inch (300 x 300mm) anodized aluminum stage
Objective lens: 10x (for searching field of view), 50x (measurement)
Internal lens: 1.0x, 1.5x, 2.0x
PC: Win7, SP1
Power supply: AC100-120V, 3-pin connector, 600W
Air source: 5kgf/cm2 *Connection is via one-touch connector 6mm
Dimensions: Approx. W900 x D850 x H1620mm
Weight: Approx. 400kg

[Equipment status]
Instruction manual included.
Control software is in English.
- A small vacuum pump for adsorbing the stage is included.
- The customer must prepare their own air (compressed air) source.