Branson / IPC L3200 8 inch

Configuration and Wafer Size:

One chamber with one Equipe PRI ATM-104-1 robot and ESC-200 controller;
2 gas lines with MFCs: O2 a 5 L MFC for gas 1 and a 500 mL CF4 MFC for gas 2
System is for 8 inch round wafer;
System can run long time recipe(4 hours);
new type DC power box and AC power box;
Upgraded with Allwin21 Corp proprietary AW-3210 AW software package with PC control and New Main Control Board. V.7.E42
Black Waffer Disc Tray
DB25 Serial RS232
End Effector Dimensions: 7.75″x1.25″ (LxW)
​N2 Purge
Air Gauge: Dwyer RMA-5-99V
Eurotherm 808 Temperature Controller
MKS BARATRON SENSOR 10 TORR,
MKS 622A11TDE
Type: 622