Axcelis INT340

Ref : 2693776-9-FM

Condition : Used

Manufacturer : Axcelis

Model : INT340

Year(s) : 2011

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section Etch

General Product Information
Vendor Supplier AXCELIS
Model AXCELIS INTEGRA ES 3CH / INT340
Vintage 2011
Software Version 3.2.2.102
CIM SECS/GEM
Process NH3 Plasmastrip

Hardware Confguration (Fab)
Main System INTEGRA ES 3CH 1 OK
Factory Interface FOUP 3 OK
Handler System Brooks Automation 2
Options System Afterburner (NH3) 6 OK

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