ASML Twinscan XT 1250 D Scanner 12"

with Cymer XLA165
Track Pre-warning signal (APR)s: APR enabled
Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track
INPUT/OUTPUT conflicts enabled
Active wafer release for dry WSs: FALSE
Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled
Continuous clampable wafer table for dry WSs: Absent
Type of wafer table on chuck 1 & 2 for immersion machines: Zerodur version 1
Wafer Stage Configurations: Wafer Stage type 2 configuration
Wafer Carrier Locations: Right
Wafers per Carriers: 25
Wafer Mark Sensors: Absent
Wafer Id Readers: Absent
Wafer Tracks: Present
Wafer Stage Types: Dual Chuck
Wafer Stress Relaxations: FALSE
Lower Docking Plates: Present
WS Balance Masss: Stainless Steel
WH Robot Power Amplifiers: CPM 20
Wafer Stage Fast Stiff X Move Electronicss: Present
Wafer Stage Mirror Block Down Electronicss: Present
Universal Prealignments: Disabled
Interferometer axis version at exposures: 3 plus 1 axis
Wafer Handling Pneumaticss: Dedicated
Wafer Switchs: Absent
Type of immersion hood for immersions: None
Specifies chuck1 & 2 layout relev. for Immersions: Chuck does not support immersion
Specifies chuck1 & 2 configs: Dry
Specifies chuck1 & 2 versions: not specified
Changed Short Stroke diff XY controllers: Disabled
Docking wheels at WH unloads: Present
Docking plate heights: Low - Immersion Hood versions: Absent
Carrier Handler Types: Mark I 300 Foup
Wafer Handling Load & Unload Robot Types: Double Fold Arm, 12 mm Z stroke
Wafer Handling Store Units: Absent
Wafer Handler wrt BF Shifted in Zs: Not Shifted
Reticle streaming lites: Disabled
Enhancements in Reticle Monitors: no enhancements
Reticle streaming: Disabled
Improvements for reticle handlings: Disabled
Extend IRIS maximum particles scanned to 50000.s: Absent
Zeroing type for Encoders Measurement Systems: Using extra hall sensors for zeroing
Reticle Stage Chuck Types: Glued Leafspring, TYPE_2: Glued LS, Pneum. GC, IFM / ENC Nitrogen purging of Reticle Stages: RS is not purged
Reticle Carrier Locations: Right
Integrated Reticle Inspection Systems: PPD1 with IRIS1 functionality
Integrated Reticle Librarys: IRL with original functionality
Reticle Sizes: 6 inch
Reticle Carrier Tag Readers: Present
Reticle Stage Long Stroke Motor Types: Cobalt Ferro 18 teeth
Reticle Stage Long Stroke Configs: TYPE_3:CoFe_18 motor, SB controlled, int. vacuum supply, pneum GC
Automated Reticle Transport Systems: Absent
Reticle Stage Lenscooler Boxes: Lenscooler Box with anti-aliasing Filter
Maximum Reticle ID Lengths: 24 Characters
Reticle Stage Measurement System on Scans: Heidenhain Encoders
Relative direction of ws to rs on the X axiss: Same
RS Object Fields: Normal
Reticle exchange types: Retex option: E