Applied Materials AMAT Centura

BOLD APPLIED MATERIALS AMAT CENTURA II consisting of:
- Model: Centura II
- 2 DPS / DTM Chambers
- SBC System Controller w/ Vita Controller Upgrade
- OTF
- Ebara System & Load Lock Pumps
- Configured for 200mm
- Used Minimally for R&D & Light Production
- Vintage: 2019

LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body
- LLK A & B Indexer and Handler Type: Platform
- LLK A & B Wafer Slide Detect: Present

ROBOTS:
- Transfer Chamber: HP+
- Transfer Chamber Blade: Ceramic

CHAMBER TYPE / LOCATION
- Chamber A & B Chamber Body Type: DPS - DTM
- Chamber A & B Process: Metal Etch
- Chamber A & B Heater / Pedestal Type: DPS Cathode ESC
- Chamber A & B Lid Type: DTCU w/ Dual Match
- Chamber A & B RF Generator: APEX 5513
- Chamber A & B Match: MKS GHW12A
- Chamber C, D & E Chamber Body Type: Blank
- Chamber C, D & E Process: N/A
- Chamber F Chamber Body Type: Orienter
- Chamber F Heater / Pedestal Type: Standard

HEAT EXCHANGER CONFIGURATION
- 3 Thermal Chillers Model 0190-32036
- 1 SMC Chiller Model 0190-53161

CHAMBER A & B GAS CONFIGURATIONS:
- CF4
- O2
- CHF3
- N2
- SF6
- Ar
- HBR
- Cl2
- C4F8