AMAT UVision 6

Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier AMAT
Model UVision 6
Vintage 2014
Software Version 788
CIM E84, SECS/GEM, GEM300
Process Wafer Inspection

Hardware Confguration (Fab)
Handler System EMULATOR V7.5 (Upgraded UV) 1 OK
Factory Interface FOUP 2 OK
Main System Bright Field Wafer Inspection System 1 OK
Handler System IBA and Virtual Recipe Computer 1 OK
Handler System Ionizer for ASYST 1 OK

Hardware Confguration (Subfab / Auxilliary Units)
PFU Unit / Line conditioner 1 OK

Missing/Faulty Parts / Accesorries List
Line conditioner 1