AMAT UVision 6

Wafer Size 300 mm
Fab Section Defect Detection

General Product Information
Vendor Supplier AMAT
Model UVISION 6
Vintage 2013
Asset Description Wafer Inspection
Software Version 788
CIM E84, SECS/GEM, GEM300
Process Wafer Inspection

Hardware Confguration (Fab)
Main System Bright Field Wafer Inspection System 1 OK
Handler System IBA and Virtual Recipe Computer 1 OK
Handler System EMULATOR V7.5 (Upgraded UV) 1 OK
Factory Interface FOUP 2 OK

Hardware Confguration (Subfab / Auxilliary Units)
PFU Unit / Line conditioner 2 OK