AMAT Semvision CX

Model: SEM Vision cX
OEM: AMAT
Accessory: 1 Baking Box, 1 User Manual

Condition at Time of Shutdown:
Operated until 2012. Planned shutdown due to reduced usage.
No critical defects were reported.

Missing Items:
UPS (⑤): Battery removed; set to bypass mode.
Water Leakage/Fire Alarm Panel (⑥):
Battery removed; set to bypass mode.
Issues:

Ion Pump Controller Display Malfunction:
→ The unit functions normally, but the display panel is defective,
making it impossible to monitor vacuum levels.
※ Dry pump is not included as part of the assets.

Device Specifications
Resolution: 4nm @ 1kV
Acceleration Voltage: 0.5kV to 15kV
Probe Current: 30, 100 pA
Magnification: ×200 to ×20,000
Tilt Angle: 15°, 30°, 45°
Rotation Angle: 0°, 45°, 90°, 180°
Wafer Size: 200 mm
Voltage (Main Unit): 3-phase 208 VAC
Voltage (EDX Rack): Single-phase 110 VAC

Main Unit: TM 2nd Floor, Clean Room (CR)
EDX Analyzer: TM 2nd Floor, Clean Room (CR)
EDX Compressor: TM 2nd Floor, Return Area
Transformer: TM 1st Floor, Utility (UT)
UPS: TM 1st Floor, Utility (UT)
Alarm Panel: TM 1st Floor, Utility (UT)
Distribution Board: TM 1st Floor, Utility (UT)
※ Dry pump is not included.