AMAT Producer SE

Wafer Size 300 mm
Fab Section Thin Film

General Product Information
Vendor Supplier AMAT
Model Producer SE
Vintage 2011

Asset Description Amat
Producer SE PECVD ---- 3ch -
CHA-BCHD, CHB-BCHD, CHC-BCHD
[TFM_U-LowK Dielectric]

Process BCHDULK

Hardware Confguration (Fab)
Main System Producer SE PECVD, 3CHM BCHD 1
Handler System FOUP 2
Factory Interface SMIF 1

Hardware Confguration (Subfab / Auxilliary Units)
Thermo Chiller HX 1
Edwards Zenith
Abatement 1
BCHD Schumacher 1
Mdeos Schumacher 1
Edwards iXH 1210H Pump 2