1/1
AMAT Centura EPI 8 inch
EUROPE (Western and Northern)
Wafer Size Range
Minimum 200 mm
Maximum 200 mm
Set Size 200 mm
Number of Chambers 3
Chamber 1 Description
White Body Cassettes; 1xprocess chamber Std. EPI;
2x poly chambers; vita controller;
3xModorized Rotation/Lift Infineon homemade;
new upgraded blower controls;
Chamber 2 Description
White Body Cassettes;
1xprocess chamber Std. EPI;
2x poly chambers; vita controller;
3xModorized Rotation/Lift Infineon homemade;
new upgraded blower controls;
Chamber 3 Description
White Body Cassettes; 1xprocess chamber Std. EPI;
2x poly chambers; vita controller;
3xModorized Rotation/Lift Infineon homemade;
new upgraded blower controls;
Power Requirements 480 V 300.0 A 3 Phase
Condition Excellent
Serial Number(s) 2484