AMAT AKT 1600 PECVD

Ref : 2628713-9-CP

Condition : Used

Manufacturer : AMAT

Model : AKT 1600 PECVD

Year(s) : 2005

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

• Process: PECVD iN,SiO2, i-a-Si, SiON and N+ a-Si
• SoFware Version: AKT7.3
• System Power RaNng: 208 VAC 3-Phase
• Flat panel size: 320 x 352 mm
• (5) Process chambers:
• Film Capability SiN
• SiO2
• i-a-Si
• SiON
• N+ a-Si (Remote Plasma Clean)

Includes:
• Chillers
• Full set of manuals

Other machines similar to AMAT AKT 1600 PECVD

1 AMAT P5000 9

Location : EUROPE (Western and Northern)

Year(s) : 2012

1 AMAT P5000 MARK II

Location : AMERICA North (USA-Canada-Mexico)

Year(s) : 1996

1 AMAT Precision 5000

Location : AMERICA North (USA-Canada-Mexico)

Year(s) : 1990

1 AMAT Centura MCVD SYS5200T

Location : United States (USA)

Year(s) : 2001