ADE UL 7000 IR
Ref : 2306571-9-CP
Condition : Used
Manufacturer : ADE
Model : UL 7000 IR
Year(s) : 2001
Quantity : 1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check : 03 Feb. 2024
Wafer Size Range
Minimum 50 mm
Maximum 200 mm
Set Size 100 mm
Mask Plate Size 5'' x 5''
Alignment Optics Splitfield Video
Proximity Alignment Capability YES
IR Backside Alignment YES
Illuminator Model Number Q-500
Illuminator Power Rating 500 Watts
External Cooling Air Cooled
Other Information Split field video with MPLAN APO 5X objectives
Print Modes:
Vacuum
Pressure
Proximity
Vacuum calibration
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