ADE, KLA-Tencor 9530-NT

It features a dual-laser profilometer,
an optical inspection module, and
an imaging acquisition machine.

The tool is also equipped with
advanced metrology measurements,
such as non-contact reflectance,
photo-induced force microscopy (PIFM),
also some treasure fresh laser induced
breakdown spectroscopy (LIBS),
and surface topography analysis.

The asset is capable of measuring wafer defects,
such as micrometer-scale bumps,
clock-speed variations, and
localized variations in metal deposition.

It is ideal for wafer processes including semiconductor,
integrated circuit (IC), MEMS device, LED,
solar cell production, and other similar processes.
It features a simple user interface that
allows the user to quickly set up, the use and
operate the model.
The equipment has an intuitive graphic user interface (GUI) that
makes it easy to set-up and operate,
as well as a user-friendly command line console for
advanced users.

Additionally, it includes automated sequence processing,
making it easy to program and monitor multiple wafers quickly.

ADE 9530-NT UltraGage also includes a
temperature control function that ensures
accurate metrology across temperature and
humidity ranges.
This feature allows the system to
perform consistent measurements over a
range of temperature and humidity levels.

Additionally, the optical microscope unit features a
focus adjustment tool, making it easier to
analyze multiple samples.