3 KLA-Tencor 8100 CD-SEM

Ref : 2172575-9-GO

Condition : Used

Manufacturer : KLA-Tencor

Model : 8100 CD-SEM

Year(s) : 1998

Quantity : 3

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Last check : 24 Apr. 2024

Configuration:
KLA-Tencor 8100 CD-SEM is an advanced metrology instrument with capability to provide superior imaging and precision measurements at the bottom of very high aspect ratio device features.

Performance Specification:
• Feature Size: < 100 nm
• Resolution: < 4.5 nm
• Electron Source: Schottky, Thermal Field Emitter
• Magnification: 2.34 kX - 400 kX
• Stage: X-Y leadscrew stage, Position Accuracy < 10 micron
• Accelerating Voltage: 0.4kV - 1.5kV
• Throughput: upto 40 wafers/hr

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