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Yield Engineering Systems (YES)
Ref :
1826898-9-CP
Condition :
Used
Manufacturer :
Yield Engineering Systems (YES)
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
EUROPE (Central and Eastern)
EUROPE (Central and Eastern)
Last check :
25 Nov. 2019
YIELD ENINEERING INC., YES 53RE, Plasma Cleaning System
3 Mass Flow Controllers (MFCs) for gas mixing
Clean Room Capability: Class 10
N2 Flow Rate: 1.7 SCFM
Process Gas Flow Rate: 20-50 SCCM average
Chamber Material: 6061-T6 aluminum
Process Gas Inputs: 3 standard, Ar, O2, N2, 4th optional
SEMI® S2 Compliance
Number of Recipes: 12 with load/save/loop/link capability
RF Plasma Power: 0-500 watts @ 550 VAC, selectable power
Nitrogen Consumption: 0 SCFM idle, 1.7 SCF for average processes
Reactant Gas Consumption: 0 SCFM idle, 150 SCC for average processes
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