Nikon

Microscope Inspection Module for Wafer Inspection System

This is the high-power microscope portion of a Nikon Optistation 3 wafer inspection system. The module includes the optical bridge structure, a sub-base, and a motorized scanning / rotating stage with Z-axis focus drive. It will handle wafers up to six inches in diameter.

The optical portion includes a built-in tilting binocular observation tube. There are two image acquisition points at the back of the optical bridge assembly. One is directed straight back and there is an attached camera system installed. It appears to have a linear array detector instead of a matrix. The second port is directed upwards and has a bayonet mount for 3-CCD cameras. A vertical illumination system is also built into the bridge as is a motorized five-position nosepiece. No objectives or oculars are included with the bridge..

All mechanical components, circuit boards, cables, and internal optical assemblies are still present. None of the cables have been severed and the connectors are still present. The external vacuum lines supplying the module have been removed. Please examine the photographs closely. We will be happy to answer any additional questions you may have within the scope of our understanding.