Hamatech 104180 Automatic Substrate Cleaner

Manual Load Automatic Substrate Cleaner
Process Chamber

Clean room class 100
Substrate size: 6.5" X 6.5" Max
Nozzels for bottom side rinse
Nozzels for chamber rinse
Swing arm for hi-pressure DI water and micro strip spray
Swing arm for acid spray
Nozzels for DI water and hydrogen peroxide spray
Media Used in Processing
DI Water
Sulphuric acid
Hydrogen peroxide
N2 and DI water for rinsing
Media Supply Module
Media pumps
Media filters
Media pressure tanks for detergent and microclean
Auxiliary Rack
Ionization unit
Circulating heater
Water circut pressure booster pump
High pressure pump
Electronics Cabinet
Tool industrial computer
Hamatech control modules
Motor controllers
Temp. controller
Power supply
Power transformer