Dainippon Screen FC-3100

Wafer Size 300 mm
Fab Section Clean

General Product Information
Vendor Supplier DNS
Model FC-3100
Vintage 2007
Asset Description PROMOS_0763
Software Version WINDOWS 7 / CSM-05a
CIM YES
Process CHEMICAL RESIST STRIP

Hardware Confguration (Fab)
Main System Handler System Screen Transfer robot (LFR) 6 OK
Handler System Screen Transfer robot (WTR) 1 OK
Handler System Screen Transfer robot (PUS) 1 OK
Handler System Screen Transfer robot (HVC) 1 OK
Handler System Screen BTR 1 OK
Handler System Screen Transfer robot (HTR) 1 OK
Options System Tank 6 QDR-HCL 1 OK
Options System Tank 2 HQDR 1 OK
Options System Tank 5 SC-1 1 OK
Options System Tank 1 SPM 1 OK
Options System Tank 3 DHF 1 OK
Options System Tank 4 QDR 1 OK
Options System LPD 1 OK
Main System Tool System 1 OK
Factory Interface SMIF 2 OK