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Brooks Automation EUV Reticle Stocker
Ref :
252622
Condition :
Used
Manufacturer :
Brooks Automation
Model :
EUV Reticle Stocker
Year(s) :
2017
Quantity :
1
Location :
Seller or machines location:
United States (USA)
United States (USA)
Last check :
26 Feb. 2025
Wafer Size 300 mm
Fab Section Support Tools
General Product Information
Vendor Supplier BROOKS
Model EUV Reticle Stocker
Vintage 2017
Process EUV_Reticlestocker
Hardware Confguration (Fab)
Handler System OHT and Manual Load Port 1 OK
Factory Interface FOUP 1 OK
Options System
Temperature control for 22 degree C
mini-environment 1 OK
Stocker with purge for XCDA 1 OK
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