Brooks Automation EUV Reticle Stocker

Ref : 2687484-9-FM

Condition : Used

Manufacturer : Brooks Automation

Model : EUV Reticle Stocker

Year(s) : 2017

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size 300 mm
Fab Section Support Tools

General Product Information
Vendor Supplier BROOKS
Model EUV Reticle Stocker
Vintage 2017
Process EUV_Reticlestocker

Hardware Confguration (Fab)
Handler System OHT and Manual Load Port 1 OK
Factory Interface FOUP 1 OK

Options System
Temperature control for 22 degree C
mini-environment 1 OK
Stocker with purge for XCDA 1 OK

Other machines similar to Brooks Automation EUV Reticle Stocker

1 Ushio MEXSY-0017-BH

Location : ASIA (North East)

Year(s) : 2006

1 AP&S WET Clean Strip (8''tool)

Location : EUROPE (Western and Northern)

Year(s) : 1999

1 Aqueous Technologies Trident III

Location : AMERICA North (USA-Canada-Mexico)

1 Accord 400 SUBTRATE

Location : AMERICA North (USA-Canada-Mexico)