Brooks Automation EUV Reticle Stocker

Ref : 252622

Condition : Used

Manufacturer : Brooks Automation

Model : EUV Reticle Stocker

Year(s) : 2017

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Support Tools

General Product Information
Vendor Supplier BROOKS
Model EUV Reticle Stocker
Vintage 2017
Process EUV_Reticlestocker

Hardware Confguration (Fab)
Handler System OHT and Manual Load Port 1 OK
Factory Interface FOUP 1 OK

Options System
Temperature control for 22 degree C
mini-environment 1 OK
Stocker with purge for XCDA 1 OK

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