AET Rapid Annealing Furnace

Rapid Annealing Furnace
Accessories
SiC Coated Graphite Susceptors
Manual
Other Information
On consignment from IET
Power Requirements 380 V 125.0 A 50 Hz 3 Phase
CE Marked YES
130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
EUROTHERM 7300A Three Phase Power Controller
LEYBOLD TTR 91 S Thermovac Vacuum Sensor
LEYBOLD Display One Single Channel Vacuum Gauge Display
VAT 24428-KA31 Pneumatic HV Right Angle Valve
TELSTAR RD-9 Vacuum Pump
HORIBA SEC-E40 Mass Flow Meter
HORIBA ROD-1 MB Modular Readout
Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
Heating power: 50kW
Input Power: 380-400VAC; 3Ph; 50Hz 125A