KLA-Tencor 2138XP Surface Inspection System

1x, KLA-Tencor, 2138XP Surface Inspection System

- Currently Setup for Processing 8"/200mm Wafers
- Low Contact Chuck
- Wafer Handling Autoloader
- 2 Standard Cassette Plates
- KLA Software Version 5.1.060
- SECS II/GEM Communication Interface
- Single Pentium CPU
- Mercury Xenon Lamp
- 400 MPS Image Computer
- Random & Array Mode Inspection
- Array Mode Pixel: 0.25, 0.39, 0.62, 1.25
- Random Mode Pixel: 0.25, 0.39, 0.62, (1.25 um pixel TBD)
- Air Bearing X-Stage
- Autofocus III with 200mm Collimating Lens
- Remote Power Distribution Panel
- Direct Link hardware with ADC Review Optics

Excellent Condition Guaranteed.
Fully Reconditioned to Meet Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return