Candela, KLA CS2

Tencor Candela 2 is an optical metrology system
manufactured by KLA Corporation.
It is primarily used in the semiconductor industry for
process control and inspection during the manufacturing of
integrated circuits (ICs) and other electronic devices.
The Candela 2 system employs optical techniques to
measure various parameters of the semiconductor wafers,
such as thickness, topography, and film properties.
It uses advanced algorithms to analyze the collected data and
provide insights into the quality and uniformity of
the wafer fabrication process.
The system consists of multiple components,
including a light source, optics, sensors, and
a computer-based control and analysis software.
The light source emits a specific wavelength of
light towards the wafer surface,
and the reflected or scattered light is collected by the sensors.
The collected data is then processed and
analyzed using the software,
which generates detailed reports and
visual representations of the measured parameters.

The Candela 2 system is known for its high accuracy,
speed, and versatility in measuring various types of
films and structures on semiconductor wafers.
It helps manufacturers maintain tight process control,
identify deviations or defects in the fabrication process,
and optimize yield and quality.